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PPS

Plasma Pre-Treatment System (PPS)

Designed for efficient gas decomposition in semiconductor exhaust lines, EN2CORE Technology’s PPS delivers high precursor breakdown performance while minimizing energy use.
Its compact, all-in-one design is significantly smaller and lighter than conventional systems, allowing easy integration and stable operation even under challenging low-pressure conditions.

ULTRA-PPS™

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    High Dissociation Efficiency

    Over 90% gas dissociation (e.g., TiCl₄, ZAC) at 35–40% lower power than competing systems.

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    Stable Operation Under Variable Conditions

    Maintains reliable plasma ignition even with pressure fluctuations and uneven gas flow.

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    Compact & Lightweight Design

    The cylindrical tube-type plasma generation unit enables a vertical straight-down piping configuration, maintaining stable plasma ignition even under pressure fluctuations or gas flow imbalance.

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    Fab-Validated Reliability Compatibility

    Co-developed with pump manufacturers to ensure long-term system stability and reduced maintenance.

PPS Specifications

ULTRA-PPS is EN2CORE Technology’s high-performance plasma gas treatment system, developed to efficiently decompose and process residual precursor gases in semiconductor exhaust lines.
It operates with low power consumption while decomposing gases such as ZAC, TiCl₄, and CF₄ at rates exceeding 90%, and features a compact all-in-one design optimized for vertical inline installation in cleanrooms.

EN2RA™ -RPS

Max. Power
12kW
Ignition Gas
<1.5 Torr @ N2 < 70 slm
Gas Compatibility

< 1.5 Torr @ N2 < 70 slm, O2, < 8 slm
(Optional gas inlet can be customized)

Process

Foreline Cleaning, exhaust line cleaning
(ZAC, TEMAZ, TEMAH, TiCl₄ evaluation completed)

  • Plasma ignition using process gases (N₂, O₂)
  • Outstanding plasma discharge performance capable of igniting N₂ up to 70 slm (world-class specification)
  • Vertically inline configuration ensures no impact on process chambers (low conductance)
  • Customizable reactor size and material
  • Compact and lightweight design (44 kg)

Conceptual diagram for PPS (Plasma Pre-treatment system)

PPS(Plasma Pre-Treatment System)

Conceptual diagram for PPS (Plasma Pre-treatment system)

Cost

Increased pump overhaul cost due to semiconductor process advancement

Safety

Safely handles a wide range of gases.

In particular, it can safely process explosive precursors such as TEMAZr and TEMAHf used in processes that form ZrO₂ and TiN.

Environment

connection with the carbon emission trading system, the problem of emission gas treatment such as PFCs/Nox has emerged

Let’s Solve Your Process Challenges

From removing harmful gases to protecting downstream systems,
EN2CORE Technology’s ULTRA-PPS delivers high-efficiency plasma decomposition with compact, low-impact design—engineered
for fab integration and environmental reliability.

Talk to an expert

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